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SENSIRION SFC6000D-5SLM

FLOW CONTROLLER, 5LPM, 0.2%, 10BAR

SENSIRION SFC6000D-5SLM
SENSIRION SFC6000D-5SLM
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Manufacturer:
SENSIRION SENSIRION
Manufacturer Part No:
SFC6000D-5SLM
Order Code:
4145352
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Technical Datasheet:
SFC6000D-5SLM   Datasheet
ECAD / MCAD
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Product Range Selector (CMOSens SFC6000D Series)

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Product Overview

SFC6000D-5SLM is a digital mass flow controller. This measures gas mass flow by the calorimetric principle based on heat transfer. A heater element on a thermally insulated membrane and two thermopiles up-stream and downstream are integrated on a single silicon chip. In the presence of gas flow, the temperature distribution up and downstream is disturbed. This asymmetry is then measured. The measurement area as well as the A/D converter and further signal processing are based on a single chip using CMOS standard processes. Moreover, the same chip also takes over the function of a microprocessor in a standard mass flow controller, directly regulating the valve.
  • 5 – 0.01slm flow range
  • Disruptive concept combining plastic body and highly integrated electronics
  • Small form factor and low weight
  • High accuracy/repeatability (2% / 0.2% of set point)
  • Wide control range (500:1), ultra-fast settling time (100ms)
  • RS485 and I²C digital interface
  • Exchangeable 6mm push-in and down mount connectors
  • NIST traceable calibration
  • No drift and no re-calibration required in the field
  • NIST traceable calibration

Product Information

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:
5l/min

:
-l/min

:
22.8V

:
25.2V

:
0.2%

:
CMOSens SFC6000D Series

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Technical Documents (5)

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6 UK stock available for 5-8 business days delivery

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$736.01 ( $846.41  Inc. GST)

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